Browsing by Author "Levin, I."

Now showing 1 - 2 of 2

Interfacial properties of ZrO2 on silicon

Lin, Y.S.
;
Puthenkovilakam, R.
;
Chang, J.P.
;
Bouldin, C.
;
Levin, I.
;
Nguyen, N.V.
;
Ehrstein, J.
Journal article
2003, Journal of Applied Physics, (93) 10, p.5945-2952
Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film

Chang, K.S.
;
Green, M.L.
;
Levin, I.
;
Hattrick-Simpers, J.R.
;
Jaye, C.
;
Fischer, D.A.
;
Takeuchi, I.
Journal article
2010, Applied Physics Letters, (96) 19, p.192114