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Browsing by Author "Li, Chenxi"

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    EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes

    Gronheid, Roel  
    ;
    Boeckx, Carolien
    ;
    Doise, Jan  
    ;
    Bekaert, Joost  
    ;
    Karageorgos, Ioannis
    Proceedings paper
    2016, Extreme Ultraviolet (EUV) Lithography VII, 21/02/2016, p.97761W

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