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Browsing by Author "Li, Jason"

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    Performance optimization of the double-exposure alternating PSM for (sub-)100-nm ICs

    Vandenberghe, Geert  
    ;
    Driessen, Frank
    ;
    Van Adrichem, Paul  
    ;
    Ronse, Kurt  
    ;
    Li, Jason
    ;
    Karklin, Linard
    Proceedings paper
    2002, 21st Annual BACUS Symposium on Photomask Technology, 3/10/2001, p.394-405

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