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Browsing by Author "Li, Muyang"

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    Evaluation of wet Cu seed deposition to enable downscaling damascene metallization

    Armini, Silvia  
    ;
    Li, Muyang
    ;
    Swerts, Johan  
    ;
    Siew, Yong Kong  
    ;
    Caluwaerts, Rudy  
    ;
    Meersschaut, Johan  
    Meeting abstract
    2012, MRS Spring Conference Symposium C: Interconnect Challenges for CMOS Technology, 8/04/2012, p.C5.2

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