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Browsing by Author "Li, Yong-Li"

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    Barrier deposition for advanced interconnects

    Schaekers, Marc  
    ;
    Tokei, Zsolt  
    ;
    Li, Yong-Li
    ;
    Carbonell, Laure
    Proceedings paper
    2007, Atomic Layer Deposition Applications 2, 29/10/2006, p.131-138

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