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Browsing by Author "Liberman, Vladimir"

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    High refractive index fluid evaluations: fluid radiation durabilitylifetimes and fluid/resist interactions

    French, Roger H.
    ;
    Bernfeld, Adam S.
    ;
    Tran, Hoang V.
    ;
    Adelman, Douglas J.
    ;
    Liberman, Vladimir
    Proceedings paper
    2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008

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