Browsing by Author "Liberman, Vladimir"
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Publication High refractive index fluid evaluations: fluid radiation durabilitylifetimes and fluid/resist interactions
;French, Roger H. ;Bernfeld, Adam S. ;Tran, Hoang V. ;Adelman, Douglas J.Liberman, VladimirProceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008