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Browsing by Author "Lim, T. H."

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    Characterization and integration of a new Si-O-C film deposited by CVD

    Alves Donaton, Ricardo
    ;
    Struyf, Herbert  
    ;
    Lepage, Muriel
    ;
    Coenegrachts, Bart  
    ;
    Stucchi, Michele  
    Proceedings paper
    2001, Advanced Metallization Conference 2000, 3/10/2000, p.595-601

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