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Browsing by Author "Lima, Lucas Petersen Barbose"

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    Conductivity improvements of atomic layer deposited Ta3N5

    Dekkers, Harold  
    ;
    Lima, Lucas Petersen Barbose
    ;
    Van Elshocht, Sven  
    Proceedings paper
    2013, Atomic Layer Deposition Applications 9, 28/10/2013, p.195-202

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