Browsing by Author "Lin, Cheng-Huei"
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Machine Learning Enhanced Optical Proximity Correction Modeling for High-NA EUV Lithography
;Wei, Chih-I ;Levinson, Zachary ;Ng, Philip C. W. ;Lin, Cheng-Huei ;Chen, Ming-YunDemmerle, WolfgangProceedings paper2026, DTCO and Computational Patterning V, 2026-02-22, p.139800C