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Browsing by Author "Lin, Cheng-Huei"

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    Publication

    Machine Learning Enhanced Optical Proximity Correction Modeling for High-NA EUV Lithography

    Wei, Chih-I
    ;
    Levinson, Zachary
    ;
    Ng, Philip C. W.
    ;
    Lin, Cheng-Huei
    ;
    Chen, Ming-Yun
    ;
    Demmerle, Wolfgang
    Proceedings paper
    2026, DTCO and Computational Patterning V, 2026-02-22, p.139800C

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