Browsing by Author "Lin, Chia-Hui"
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Publication DUV resist profile improvement on TiN deposited metal layer
Proceedings paper1996, Optical Microlithography IX, 13/03/1996, p.427-436Publication HREM characterization of ion beam synthesized ternary silicides in (111) silicon
Proceedings paper1995, Microscopy of Semiconducting Materials 1995. Proceedings, 20/03/1995, p.533-536Publication Ion beam synthesis of ternary phase CoFe-silicide in (111)Silicon
Journal article1995, Appl. Phys. Lett., 67, p.986-988