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Browsing by Author "Lin, Guanyan"

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    Process sensitivities in exemplary chemo-epitaxy directed self-assembly integration

    Rincon Delgadillo, Paulina  
    ;
    Gronheid, Roel  
    ;
    Lin, Guanyan
    ;
    Cao, Yi
    ;
    Romo Negreira, Ainhoa  
    Proceedings paper
    2013, Alternative Lithographic Technologies V, 24/02/2013, p.86801H

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