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Browsing by Author "Lin, Hang Chun"

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    ALD on high mobility channels: engineering the proper gate stack passivation

    Sioncke, Sonja
    ;
    Lin, Hang Chun
    ;
    Adelmann, Christoph  
    ;
    Brammertz, Guy  
    ;
    Delabie, Annelies  
    Proceedings paper
    2010, Atomic Layer Deposition Applications 6, 10/10/2010, p.9-23

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