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    Vapor deposited thin organic-inorganic capping layers preventing copper line oxidation in polymer-based RDL technologies

    Chery, Emmanuel  
    ;
    Brady-Boyd, Anita  
    ;
    Lin, Yuyuan
    ;
    Grimes, Michael
    ;
    Springer, David
    Journal article
    2022-10-15, Microelectronic Engineering, (266) 15 October 2022, p.111896-111902

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