Browsing by Author "Ling, Zhi Ming"
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Publication Effect of CMP slurry filtration on wafer defectivity
Oral presentation1998, MRS Spring Meeting 1998. Symposium Q: Materials Issues in Chemical-Mechanical Polishing; April 15-16, 1998; San Francisco, CalifPublication Porous structures and short-wavelength photoluminescence of C+-implanted SiO2 films
Publication Relation between oxide-CMP induced defects and post-CMP cleaning strategies
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.173-176Publication Relation between oxide-CMP induced defects and post-CMP cleaning strategies
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS