Browsing by Author "Linskens, Frank"

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Comparative study of porous SOG films with different non-destructive instrumentation

Baklanov, Mikhaïl
;
Kondoh, Eiichi
;
Linskens, Frank
;
Gidley, D. W.
;
Lee, Hean-Cheal
Proceedings paper
2001, Proceedings of the IEEE 2001 International Interconnect Technology Conference, 4/06/2001, p.189-191
Proximity bias swing: origin and characterization

Zandbergen, Peter
;
Gehoel-van Ansem, Wendy
;
de Klerk, Jos
;
Vandenberghe, Geert
;
Linskens, Frank
Proceedings paper
2009, Advances in Resist Technology and Processing XV, 23/02/1998, p.837-844