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Browsing by Author "Liu, Chi-Chun"

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    Towards an all-track 300 mm process for direct self-assembly

    Liu, Chi-Chun
    ;
    Thode, Christopher J.
    ;
    Rincon Delgadillo, Paulina  
    ;
    Craig, Gordon S.W.
    Journal article
    2011, Journal of Vacuum Science and Technology B, (29) 6, p.06F203

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