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Browsing by Author "Liu, Huayu"

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    Feasibility study of the approach to Flare, shadowing, optical and process corrections for EUVL OPC

    Nikolsky, Peter
    ;
    Davydova, Natalia
    ;
    van Ingen Schenau, Koen
    ;
    Van Adrichem, Paul  
    ;
    Hendrickx, Eric  
    Proceedings paper
    2009-09, Photomask Technology 2009, 14/09/2009, p.74882N

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