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    Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials

    Heyne, Markus
    ;
    Zhang, Liping  
    ;
    Liu, Junjun
    ;
    Ahmad, Iftikhar
    ;
    Toma, Dorel
    Journal article
    2014, Journal of Vacuum Science and Technology B, (32) 6, p.62202

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