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Browsing by Author "Lodha, Jayant K."

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    Self-assembled monolayers as inhibitors for area-selective deposition: A novel approach towards resist-less EUV lithography

    Lodha, Jayant K.
    ;
    Pollentier, Ivan  
    ;
    Conard, Thierry  
    ;
    Vallat, Remi  
    ;
    De Gendt, Stefan  
    Journal article
    2022, APPLIED SURFACE SCIENCE, 606, p.154657

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