Browsing by Author "Loh, James"
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Publication Evaluation and screening of different wet cleaning solutions on BEOL applications
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2070Publication Screening and evaluation of different wet cleaning solution for post etch residue removal in BEOL applications
Proceedings paper2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.101-107