Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Lohr, Leonhard M."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology

    Ciesielski, Richard
    ;
    Lohr, Leonhard M.
    ;
    Mertens, Hans  
    ;
    Charley, Anne-Laure  
    ;
    de Ruyter, Rudi
    Proceedings paper
    2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 124961M

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings