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    A silicon micromachined magnetic actuator using a two layer electroplating process

    De Bruyker, Dirk
    ;
    Chévrier, Jean-Baptiste
    ;
    Baert, Kris
    ;
    Puers, Bob  
    ;
    Lowe, H.
    Proceedings paper
    1996, Actuator 96. 5th International Conference on New Actuators. Conference Proceedings; 26-28 June 1996; Bremen, Germany., p.88-91

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