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Browsing by Author "Lu, Jiong-Ping"

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    Strain enhanced nMOS using in-situ doped embedded Si:C S/D stressors with up to 1.5% substitutional carbon content grown using a novel deposition process

    Verheyen, Peter  
    ;
    Kerner, Christoph  
    ;
    Clemente, Francesca
    ;
    Bender, Hugo  
    ;
    Shamiryan, Denis
    Proceedings paper
    2008, 4th International SiGe Technology and Device Meeting, 11/05/2008

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