Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Lucca, D.A."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Prediction of scratch generation in chemical mechanical planarization

    Chandra, A.
    ;
    Karra, P.
    ;
    Bastawros, A.F.
    ;
    Biswas, R.
    ;
    Sherman, P J.
    ;
    Armini, Silvia  
    ;
    Lucca, D.A.
    Journal article
    2008, CIRP Annals. Manufacturing Technology, (47) 1, p.559-562

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings