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Browsing by Author "Lucero, S."

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    Integration feasibility of porous SiLK semiconductor dielectric

    Waeterloos, Joost
    ;
    Struyf, Herbert  
    ;
    Van Aelst, Joke  
    ;
    Castillo, D. W.
    ;
    Lucero, S.
    ;
    Caluwaerts, Rudy  
    Proceedings paper
    2001, Proceedings of the IEEE 2001 International Interconnect Technology Conference, 4/06/2001, p.253-254

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