Browsing by Author "Luehrmann, P."
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Publication 248 nm lithography for the 0.18 μm generation
Proceedings paper1996, Proceedings of the Microlithography Seminar INTERFACE'96, 27/10/1996, p.29-42Publication CD control comparison of step & repeat versus step & scan DUV lithography for sub-0.25 μm gate printing
Proceedings paper1998, Optical Microlithography XI, 25/02/1998, p.56-66Publication Sub-0.25 micron lithography applying illumination pupil filtering (quadrupole) on a DUV step-and-repeat system