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Browsing by Author "Luettgenau, Bernhard"

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    EUV scattering from CNT pellicles: measurement and control

    Pollentier, Ivan  
    ;
    Luettgenau, Bernhard
    ;
    Brose, Sascha
    ;
    Timmermans, Marina  
    Proceedings paper
    2021, Conference on Extreme Ultraviolet (EUV) Lithography XII, FEB 22-26, 2021, p.1160911

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