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Browsing by Author "Luo, S. J"

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    A study in interactions of plasmas and wet cleans with ULK materials

    Xu, Kaidong
    ;
    Vereecke, Guy  
    ;
    Kesters, Els  
    ;
    Le, Quoc Toan  
    ;
    Lux, Marcel  
    ;
    Kraus, Harald
    ;
    Henry, Sally - Ann
    Proceedings paper
    2007, 1st International Workshop Plasma Etch and Strip in Microelectronics - PESM, 10/09/2007

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