Browsing by Author "Luo, Shijian"
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Publication Improved low-k dielectric properties using He/H2 plasma for resist removal
;Urbanowicz, Adam ;Shamiryan, Denis ;Marsik, Premysl ;Travaly, YoussefJonas, AlainProceedings paper2009, Advanced Metallization Conference 2008 (AMC 2008), 22/09/2008, p.593-598