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Browsing by Author "Luo, Shijian"

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    Improved low-k dielectric properties using He/H2 plasma for resist removal

    Urbanowicz, Adam
    ;
    Shamiryan, Denis
    ;
    Marsik, Premysl
    ;
    Travaly, Youssef
    ;
    Jonas, Alain
    Proceedings paper
    2009, Advanced Metallization Conference 2008 (AMC 2008), 22/09/2008, p.593-598

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