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Browsing by Author "Lurquin, Jelle"

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    Towards an improved megasonic cleaning process: influence of surface tension on bubble activity in acoustic fields

    Camerotto, Elisabeth  
    ;
    Brems, Steven  
    ;
    Hauptmann, Marc
    ;
    Lurquin, Jelle
    ;
    Struyf, Herbert  
    Proceedings paper
    2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.173-176

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