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Browsing by Author "Luttgenau, Bernard"

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    EUV scattering from carbon nanotube pellicles: measurement and control

    Pollentier, Ivan  
    ;
    Luttgenau, Bernard
    ;
    Brose, Sascha
    ;
    Timmermans, Marina  
    ;
    Huyghebaert, Cedric  
    Journal article
    2021, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (20) 2, p.021007

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