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Browsing by Author "Maes, Jan-Willem"

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    Maximization of active As doping (selective) epitaxial Si and SiGe layers

    Loo, Roger  
    ;
    Bajolet, Philippe
    ;
    Bauer, Matthias
    ;
    Maes, Jan-Willem
    ;
    Caymax, Matty  
    ;
    Arena, Chantal
    Proceedings paper
    2004-10, SiGe: Materials, Processing, and Devices. Proceedings of the 1st International Symposium, 3/10/2004, p.1123-1133

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