Browsing by Author "Maheshwari, Abhishek"
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Detailed characterization of the effects of plasma treatments on an advanced 2.0 low-k material
Journal article2013, ECS Journal of Solid State Science and Technology, (2) 5, p.N103-N109Publication The effect of Ar/H2 plasma pretreatments on porous k=2.0 dielectrics for pore sealing by self-assembled monolayers deposition
Proceedings paper2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.146-149