Browsing by Author "Mair, R."

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Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics

Mebendale, M.
;
Kotelyanskii, M.
;
Mair, R.
;
Mukundhan, P.
;
Bogdanowicz, Janusz
;
Teugels, Lieve
Proceedings paper
2020, 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), AUG 24-26, 2020
IMAGING OF OVERLAY AND ALIGNMENT MARKERS UNDER OPAQUE LAYERS USING PICOSECOND LASER ACOUSTIC MEASUREMENTS AM: Advanced Metrology

Mehendale, M.
;
Antonelli, A.
;
Mair, R.
;
Mukundhan, P.
;
Bogdanowicz, Janusz
;
Charley, Anne-Laure
Proceedings paper
2021, 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), MAY 10-12, 2021