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Browsing by Author "Malankin, Evgeny"

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    High NA EUV single patterning of advanced metal logic nodes: Inverse lithography techniques in combination with alternative mask absorbers

    Armeanu, Ana-Maria
    ;
    Pellens, Nick  
    ;
    Philipsen, Vicky  
    ;
    Malankin, Evgeny
    ;
    Xu, Dongbo
    Proceedings paper
    2024, 39th European Mask and Lithography Conference (EMLC), JUN 17-19, 2024, p.Art. 132731M

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