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Browsing by Author "Manchelevich,"

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    Publication

    Area-selective Ru-ALD by amorphous carbon modification using H radicals

    Zyulkov, Ivan  
    ;
    Voronina,
    ;
    Voloshin,
    ;
    Chan, BT  
    ;
    Manchelevich,
    ;
    Rachimova,
    ;
    Armini, Silvia  
    Meeting abstract
    2019, ASD workshop, 4/04/2019

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