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Browsing by Author "Mangelschots, G."

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    Publication

    The effect of CF4 contaminant gas on N2O oxidation

    Kelleher, Ann
    ;
    Elsmore, Chris
    ;
    Schaekers, Marc  
    ;
    Mertens, Paul  
    ;
    Heyns, Marc  
    ;
    Mangelschots, G.
    Oral presentation
    1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

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