Browsing by Author "Mankelevich, Yu A"
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Publication Charging and the secondary electron-electron emission on a trench surface: broadening and shift of ion energy spectrum at plasma trench etching
;Palov, A P ;Mankelevich, Yu A ;Rakhimova, T VShamiryan, DenisJournal article2010, Journal of Physics D: Applied Physics, (43) 7, p.75203