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Browsing by Author "Mapeldoram, L."

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    Influence of boron diffusion on ultra-thin oxides

    Nigam, Tanya
    ;
    Depas, Michel
    ;
    Heyns, Marc  
    ;
    Sofield, C. F.
    ;
    Mapeldoram, L.
    Proceedings paper
    1997, Materials Reliability in Microelectronics VII, 31/03/1997, p.101-106

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