Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Marchelli, Anat"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Diffraction based overlay metrology: accuracy and performance on front end stack

    Leray, Philippe  
    ;
    Cheng, Shaunee
    ;
    Kandel, Daniel
    ;
    Adel, Mike
    ;
    Marchelli, Anat
    ;
    Vakshtein, Irina
    Proceedings paper
    2008, Metrology, Inspection, and Process Control for Microlithography XXII, 24/02/2008, p.69220O

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings