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Browsing by Author "Marcus, Steven"

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    Band edge work function metal gates using PEALD TaCN electrodes

    Maes, Jan  
    ;
    Swerts, Johan  
    ;
    Pierreux, Dieter  
    ;
    Machkaoutsan, Vladimir  
    ;
    Marcus, Steven
    Oral presentation
    2009, 9th International Conference on Atomic Layer Deposition - ALD

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