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Browsing by Author "Martin, P. W."

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    Gray bar masking: fabrication and imaging for 193 nm

    Smith, Bruce
    ;
    Vandenberghe, Geert  
    ;
    Martin, P. W.
    ;
    Rack, P.
    ;
    Hsu, S.
    ;
    Chen, F.
    Oral presentation
    2001, 21st Annual BACUS Symposium on Photomask Technology; October 2001; Monterey, CA, USA.

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