Browsing by Author "Masaoka, Toru"
Now showing 1 - 5 of 5
- Results Per Page
- Sort Options
Publication Dissolution of germanium in sulfuric acid based solutions
Proceedings paper2015, 14th International Symposium On Semiconductor Cleaning Science And Technology - SCST 14, 11/10/2015, p.277-284Publication Effect of dilute hydrogen peroxide in ultrapure water on SiGe epitaxial process
Proceedings paper2016, Ultra Clean Processing of Semiconductor Surfaces XIII, 11/09/2016, p.27-30Publication Enabling GeH4-HCl in-situ pre-epi clean: impact of water quality on HF last process performance
Meeting abstract2015, E-MRS Fall Symposium: Alternative Semiconductor Integration in Si Microelectronics: Materials, Techniques and Applications, 15/09/2015Publication Impact of hydrogen peroxide in ultrapure water
Publication Study of cobalt etch control by pH and oxidizer
Meeting abstract2018, Surface Preparation and Cleaning Conference - SPCC, 9/04/2018