Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Massoubre, D."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Electrical properties of MOCVD HfO2 dielectric layers with polysilicon gate electrodes for CMOS applications

    Date, Lucien  
    ;
    Rittersma, Chris
    ;
    Massoubre, D.
    ;
    Ponomarev, Youri
    ;
    Roozeboom, F.
    ;
    Pique, Didier
    Proceedings paper
    2003, 14th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 31/03/2003, p.133-136

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings