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Browsing by Author "Matovu, John Bogere"

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    Use of multifunctional carboxylic acids and hydrogen peroxide to improve surface quality and minimize phosphine evolution during chemical mechanical polishing of indium phosphide surfaces

    Matovu, John Bogere
    ;
    Ong, Patrick  
    ;
    Krishnan, Sitaraman
    ;
    Babu, S.V.
    ;
    Leunissen, Peter
    Journal article
    2013, Industrial and Engineering Chemistry Research, (52) 31, p.10664-10672

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