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Browsing by Author "Matsumoto, Y."

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    Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin films

    Godavarthi, Srinivas
    ;
    Wang, Cong
    ;
    Verdonck, Patrick  
    ;
    Matsumoto, Y.
    ;
    Koudriavtsev, I
    ;
    Dutt, A.
    Journal article
    2015, Thin Solid Films, 575, p.103-106

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