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Browsing by Author "Matsutani, Mihoko"

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    Effect of bake/cure temperature of an advanced organic ultra low-k material on the interface adhesion strength to metal barriers

    Vanstreels, Kris  
    ;
    Pantouvaki, Marianna  
    ;
    Ferchichi, Abdelkarim
    ;
    Verdonck, Patrick  
    Journal article
    2011, Journal of Applied Physics, (109) 7, p.74301

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