Browsing by Author "Mayur, A."
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Publication A comparison of spike, flash, SPER and laser annealing for 45nm CMOS
Proceedings paper2003, CMOS Front-End Materials and Process Technology, 21/04/2003, p.261-266Publication Ultra shallow junctions formed by sub-melt laser annealing
Proceedings paper2005, 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 4/10/2005, p.87-91