Browsing by Author "Mazurenko, Alexander"
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Publication Perspectives on the characterization of elastic properties of thin soft film with acoustic techniques
Proceedings paper2005, 12th International Conference on Composites and Nanoengineering - ICCE-12, 1/08/2005Publication Surface acoustic waves as a technique for in-line detection of processing damage to low-k dielectrics
Proceedings paper2005-06, Proceedings IEEE International Interconnects Technology Conference - IITC, 6/06/2005, p.217-219