Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "McCallum, M."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    CD control for two-dimensional features in future technology nodes

    Verhaegen, Staf
    ;
    Gordon, R.
    ;
    Jonckheere, Rik  
    ;
    McCallum, M.
    ;
    Ronse, Kurt  
    Proceedings paper
    2001, Optical Microlithography XIV, 27/02/2001, p.368-378

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings